Details

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Achieves highly efficient and stable processing with ozonized water that has high concentration and flow rate stability

• Supplies highly concentrated ozonized water at high volumes
• Ozonized water with few impurities
• High concentration and flow rate stability
• Highly reliable and easy to operate
• SEMI/CE mark available

Features and Benefits

Model OZW supplies ozonized water with high concentration and flow rate stability. It is able to produce ozonized water with few impurities, thanks to a particle-free pump and EBARA’s proprietary ozone gas dissolution know-how. The ozonized water is continuously monitored and the measurement data is used for feedback control to stabilize the ozone concentration at a steady level. To facilitate operation in combination with cleaning systems, built-in operating signal and interlock signal circuits are provided. The system is also easy to maintain. Equipped with safety features such as an ozone leak sensor and ozone gas detoxifying catalyst to stop the unit safely in the event of an error or emergency.