Details

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Enables optimization of chamber exhaust/exhaust gas abatement process, reduces integration and management costs

• Flexible configuration
• Reduced installation burden
• Space-saving
• Batch operation and management possible
• Connect 1-8 pumps

Features and Benefits

Integrated dry vacuum pump/exhaust abatement systems. We will propose a system that will maximize production efficiency for our customers. Incorporating dry vacuum pumps into an exhaust abatement system with the ideal configuration for the requirements will reduce the burden of equipment installation. Batch operation and management is possible as an integrated exhaust system, achieving highly efficient processes.