Details

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Dry exhaust abatement system for highly efficient and safe treatment of PFC gases with no need for water scrubbing

• Dry exhaust abatement system
• Low power consumption
• Highly efficient abatement of PFC gases
• Solidification of fluorine series gases
• No water scrubbing required
• No fuel required

Features and Benefits

Model FDS is a dry exhaust abatement system that enables highly efficient and safe treatment of PFC gases with no need for water scrubbing. Capable of highly efficient treatment of at least 99.9% of PFC gases, and with the dry solidification of fluorine series gases after decomposition, no wastewater is generated and there is no need for treatment of toxic wastewater. Dual-cylinder types offer PFC removal efficiency of 99% or more at a maximum gas inflow rate of 250 L/min (in case of 250-L/min dual-cylinder type) and major improvements in system up time due to reactor vessel serial flow design, while a single-cylinder type enables easy replacement of existing dry exhaust abatement systems. Ideal for research laboratories that do not have wastewater treatment equipment or fuel lines.

Specifications