Details
Combustion-type exhaust abatement system for large flow volumes of up to 1,200 L/min
- Combustion-type exhaust abatement systems
- Capable of processing large volumes of inflow gases
- Batch treatment of multiple gas types
- Highly efficient abatement of PFCs
- Byproduct removal measures/automatic removal of powdery byproducts
- Low running cost
- On-demand operation to suit gas type and volume
- Greater ease of maintenance
Features and Benefits
Model G6 is a combustion-type exhaust abatement system that is capable of highly efficient, large-volume treatment of various types of gasses. Inflow gas volume is three times larger than conventional models. Suited to the treatment of large flows of high-heat-generating hydrogen gas. Reduction of running costs achieved through on-demand operation with variable fuel volume to suit the type and volume of gas being abated. Byproduct countermeasures, such as large-capacity byproduct traps, achieve reductions in maintenance costs and load in the abatement of high flow-rate gases. Ideal for applications in the manufacturing operations of electric components such as semiconductors, LCD panels, solar cells, and LEDs, chemicals and materials manufacture, and research laboratories.
Specifications
| Model | Unit | G6 A1~A4 | G6 P1~P4 |
| Abatement method | burn+ wet | burn+ wet | |
| Max. inflow gas volume | L/min | 1,200 x 1,900 x 2,300 | 1,200 x 1,900 x 2,300 |
| Fuel | City gas | Propane gas | |
| Dimensions | W x D x H mm | 1,200 x 1,900 x 2,300 | 1,200 x 1,900 x 2,300 |
| Gases (e.g.) | Process (depo) gases SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, H2, PH3, Si3H8, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. |
Process (depo) gases SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, H2, PH3, Si3H8, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. |
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| Standard equipment | Large flow-rate NF3 abatement burner | Large flow-rate NF3 abatement burner | |
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