Details
Combustion-type exhaust abatement system capable of simultaneous abatement of large volumes of hydrogen and chlorine gas
- Combustion-type exhaust abatement systems
- Treat large volumes of chlorine gas and hydrogen gas simultaneously
- Batch treatment of multiple gas types
- Highly efficient abatement of PFCs
- Byproduct removal measures/automatic removal of powdery byproducts
- Low running cost
- On-demand operation
- Greater ease of maintenance
Features and Benefits
Model G6-E is a combustion-type exhaust abatement system suited to the treatment of large volumes of gases containing hydrogen and chlorine used for epitaxial growth and other systems in processes to manufacture semiconductors. With a compact design, it is able to treat hydrogen at up to 200 L/min. Capable of treating chlorine gas and hydrogen gas simultaneously. Byproduct removal function installed as standard, reducing maintenance costs and load.
Specifications
| Model | Unit | G6-E A1~A4 | G6-E P1~P4 |
| Abatement method | burn+ wet | burn+ wet | |
| Max. inflow gas volume | L/min | 400 | 400 |
| Fuel | City gas | Propane gas | |
| Dimensions | W x D x H mm | 1,200×650×1,900mm | 1,200×650×1,900mm |
| H₂ abatement | L/min | 200 | 200 |
| Gases (e.g.) | Process (depo) gases H2, PH3, Si3H8, SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. |
Process (depo) gases H2, PH3, Si3H8, SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. |
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| Standard equipment | Large flow-rate H2 abatement burner | Large flow-rate H2 abatement burner | |
| Burner scraper for powder removal | Burner scraper for powder removal | ||
| Options | City water/drainage consumption reduction unit | City water/drainage consumption reduction unit | |
| Fan scrubber for reduction of powder emissions | Fan scrubber for reduction of powder emissions | ||
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