Details
Combustion-type exhaust abatement system with low NOx emissions and abundant reaction byproduct measures for reduced maintenance costs.
- Combustion-type exhaust abatement systems
- Low NOx and low CO emissions
- Batch treatment of multiple gas types
- Highly efficient abatement of PFCs
- Byproduct removal measures/automatic removal of powdery byproducts
- Wet-burn-wet model available
- Long maintenance intervals
- Low running cost
Features and Benefits
The Model TND range is a combustion-type exhaust abatement system that uses a unique combustion system to achieve low NOx and low CO emissions. A variety of corrosion and byproduct countermeasures achieves maintenance intervals that are three times longer than conventional products. Lower cost operation is also possible with the low utility consumption that provides reduced running costs. The range includes the Model TND-Single (burn+ wet) and the Model TND-Single Plus (wet + burn + wet). This range achieves low running costs and highly efficient abatement even for processes with high byproduct generation.
Specifications
| Model | Unit | TND-Single A1-A4/ TND-Single P1~P4 | TND-Single Plus-A1~A4/P1~P4 |
| Abatement method | burn+ wet | wet + burn + wet | |
| Max. inflow gas volume | L/min | 200(per port） | 200(per port） |
| 400(per burner） | 400(per burner） | ||
| Fuel | City gas or propane gas | City gas or propane gas | |
| Dimensions | W x D x H mm | 1,200 x 650 x 1,980 | 1,200 x 650 x 1,980 |
| Gases (e.g.) | Process (depo) gases SiH4, PH3, GeH4, AsH3, NH3, SiH2Cl2, B2H6, H2, PH3, Si3H8, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. |
Process (depo) gases WF6, TiCl4, SiH4, PH3, GeH4, NH3, SiH2Cl2, TEOS, B2H6, H2, etc. Cleaning gases - all types NF3, ClF3, HF, F2, HCl, COF2, etc. Etching gases – all types HBr, Cl2, SiCl4, BCl3, CO, C5F8, C4F6, etc. PFCs CF4, C2F6, C3F8, CHF3, SF6, etc. |
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| Standard equipment | Washing mechanism for powder removal | Powder filtering mechanism | |
| Burner scraper for powder removal | Burner scraper for powder removal | ||
| Options | City water/drainage consumption reduction unit | City water/drainage consumption reduction unit | |
| Fan scrubber for reduction of powder emissions | Fan scrubber for reduction of powder emissions | ||
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