Details

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A dry vacuum pump and exhaust gas treatment device integrated system that enables optimization of chamber exhaust and exhaust gas treatment processes and reduces integration and management costs.

• Flexible configuration
• Reduced installation burden
• Space-saving
• Batch operation and management possible
• Connect 1-8 pumps

Features and Benefits

The dry vacuum pump + exhaust gas treatment equipment integrated system is an integrated product of our dry vacuum pump and exhaust gas treatment equipment. We propose systems that maximize your production efficiency. By incorporating the optimal dry vacuum pump into the exhaust gas treatment equipment according to the requirements, the load on equipment installation is reduced. As an integrated exhaust system, it can be operated and managed all at once, realizing highly efficient processes.