Details

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Dry vacuum pump suitable for pumping light gases such as hydrogen. Ideal design for fast pump-down requirements in large volume chambers.

• For fast pumping in large-volume vacuum chambers
• Optional exhaust configurations for organic solvent applications
• Hydrogen and other light gas pumping
• Corrosion resistant material options
• Oil-free
• CE marking/SEMI-S2/NRTL available
• Catalog

Features and Benefits

The Model ESA product lineup includes models with pumping speeds ranging from 1,400 to 10,000 L/min, suited for pumping light gases such as hydrogen, and models with exhaust speeds from 20,000 to 80,000 L/min, for fast pumping in large volume chambers. The light-gas application models with pumping speeds of 10,000 L/min and below offer a small footprint and enhanced corrosion resistance options, which are ideal for large-volume light-gas pumping applications such as MO-CVD. The larger models achieve quiet, low-vibration operation, with optional exhaust configurations for organic solvent applications. They are ideal for LCD spatter devices, vacuum drying processes, and large load-lock applications.


Specifications