Details

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Dry vacuum pump suitable for handling reaction byproducts and for fast pump-down requirements in large-volume chambers

• High-temperature operation control
• High exhaust speeds
• Large pumping volumes
• Corrosion resistant materials employed as standard
• Enhanced corrosion resistant options
• High-load applications
• Identical pumping performance regardless of frequency (50/60 Hz)
• Oil-free
• CE marking/SEMI-S2/NRTL available

Features and Benefits

The Model EST range uses a screw-type rotor and is equipped with a high-temperature operation function to maintain gas in the pump at high temperatures. Best suited for applications where reaction byproducts are generated, such as CVD. With corrosion resistant materials employed as standard, this model achieves high exhaust speeds and large pumping volumes and contributes to process efficiency by curbing downtime.

Specifications