Details

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Dry vacuum pump with low power consumption, ideal for performance for high-load applications

• High-load applications
• High-temperature operation control
• Low power consumption
• Corrosion resistant materials employed as standard
• Enhanced corrosion resistant options
• Identical pumping performance regardless of frequency (50/60 Hz)
• Oil-free
• CE marking/SEMI-S2/NRTL available

Features and Benefits

With EBARA’s unique heat-resistance technology, the Model EV-M range is designed for high-load applications where large volumes of reaction byproducts are generated in semiconductor, liquid crystal, and solar cell manufacturing processes. With its outstanding power consumption performance, the Model EV-M range has mastered the balance between resistance to high-load applications and energy efficiency. Robust anti-corrosion materials are employed as standard. A large-capacity model offering a pumping rate of 110,000 L/min is also available. The extensive product line-up caters to a wide range of high-load applications to match process conditions.

Specifications